Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Jay D. Pinson, II, Dongqing Li, Jingmei Liang, Yizhen Zhang | 2021-03-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Jay D. Pinson, II, Dongqing Li, Jingmei Liang, Yizhen Zhang | 2021-03-02 |