Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Daemian Raj, Jay D. Pinson, II, Jingmei Liang, Yizhen Zhang | 2021-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Daemian Raj, Jay D. Pinson, II, Jingmei Liang, Yizhen Zhang | 2021-03-02 |