Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903066 | Heater support kit for bevel etch chamber | Tuan Nguyen, Jeongmin Lee, Abdul Aziz Khaja | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903066 | Heater support kit for bevel etch chamber | Tuan Nguyen, Jeongmin Lee, Abdul Aziz Khaja | 2021-01-26 |