Issued Patents All Time
Showing 51–75 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6987348 | Piezoelectric transducers | Steven A. Buhler, John S. Fitch, John R. Andrews, Cathie J. Burke, Peter J. Nystrom +1 more | 2006-01-17 |
| 6967431 | Piezoelectric transducers and methods of manufacture | Steven A. Buhler, John S. Fitch | 2005-11-22 |
| 6964201 | Large dimension, flexible piezoelectric ceramic tapes | Baomin Xu, Steven A. Buhler, William S. Wong, Michael C. Weisberg, Scott E. Solberg +1 more | 2005-11-15 |
| 6924584 | Piezoelectric transducers utilizing sub-diaphragms | Steven A. Buhler, John S. Fitch, Meng H. Lean | 2005-08-02 |
| 6866255 | Sputtered spring films with low stress anisotropy | David K. Fork, Scott E. Solberg | 2005-03-15 |
| 6646235 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Bruce W. Peuse, Yu-Chia Chang | 2003-11-11 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Steven Chen, Henry Ho, Ying Yu | 2003-11-11 |
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Ivo Raaijmakers +1 more | 2002-12-31 |
| 6461435 | Showerhead with reduced contact area | Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao, Ken Kaung Lai +4 more | 2002-10-08 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Ivo Raaijmakers +1 more | 2002-09-03 |
| 6423949 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Bruce W. Peuse, Yu-Chia Chang | 2002-07-23 |
| 6291343 | Plasma annealing of substrates to improve adhesion | Jennifer Meng Chu Tseng, Mei Chang, Ling Chen, David Charles Smith, Chyi Chern +1 more | 2001-09-18 |
| 6251758 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Ivo Raaijmakers +1 more | 2001-06-26 |
| 6231674 | Wafer edge deposition elimination | Aihua Chen, Dashun Steve Zhou | 2001-05-15 |
| 6125859 | Method for improved cleaning of substrate processing systems | Chien-Teh Kao, Anand Vasudev, Dong Won Koo | 2000-10-03 |
| 6103014 | Chemical vapor deposition chamber | Lawrence Chung-Lai Lei, Ilya Perlov, Alan F. Morrison, Mei Chang, Ashok Sinha | 2000-08-15 |
| 6071572 | Forming tin thin films using remote activated specie generation | Roderick C. Mosely, Jim Van Gogh | 2000-06-06 |
| 6033480 | Wafer edge deposition elimination | Aihua Chen, Dashun Steve Zhou | 2000-03-07 |
| 6024799 | Chemical vapor deposition manifold | Chen-An Chen | 2000-02-15 |
| 5989999 | Construction of a tantalum nitride film on a semiconductor wafer | Timothy E. Levine, Ling Chen, Mei Chang, Roderick C. Mosely, Ivo Raaijmakers | 1999-11-23 |
| 5935338 | Chemical vapor deposition chamber | Lawrence Chung-Lai Lei, Ilya Perlov, Alan F. Morrison, Mei Chang, Ashok Sinha | 1999-08-10 |
| 5888304 | Heater with shadow ring and purge above wafer surface | Salvador P. Umotoy, Alan F. Morrison, Richard A. Marsh, Lawrence Chung-Lai Lei, Dale R. DuBois | 1999-03-30 |
| 5882419 | Chemical vapor deposition chamber | Ashok Sinha, Mei Chang, Ilya Perlov, Alan F. Morrison, Lawrence Chung-Lai Lei | 1999-03-16 |
| 5858464 | Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers | Dashun Steve Zhou, Alfred Mak, Ling Chen | 1999-01-12 |
| 5856240 | Chemical vapor deposition of a thin film onto a substrate | Ashok Sinha, Mei Chang, Ilya Perlov, Alan F. Morrison, Lawrence Chung-Lai Lei | 1999-01-05 |