Issued Patents All Time
Showing 76–80 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5800686 | Chemical vapor deposition chamber with substrate edge protection | Lawrence Chung-Lai Lei | 1998-09-01 |
| 5766365 | Removable ring for controlling edge deposition in substrate processing apparatus | Salvador P. Umotoy, Alan F. Morrison, Richard A. Marsh, Lawrence Chung-Lai Lei | 1998-06-16 |
| 5695568 | Chemical vapor deposition chamber | Ashok Sinha, Mei Chang, Ilya Perlov, Alan F. Morrison, Lawrence Chung-Lai Lei | 1997-12-09 |
| 5516367 | Chemical vapor deposition chamber with a purge guide | Lawrence Chung-Lai Lei, Ilya Perlov, Alan F. Morrison, Mei Chang, Ashok Sinha | 1996-05-14 |
| 5326725 | Clamping ring and susceptor therefor | Semyon Sherstinsky, Charles C. Harris, Mei Chang, Dale R. Du Bois, James Roberts +3 more | 1994-07-05 |