Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9886764 | Image acquisition system, image acquisition method, and inspection system | Guoheng Zhao, Stanley Stokowski, Johan De Greeve, Maarten J. van der Burgt, Karel Van Gils | 2018-02-06 |
| 9784987 | Apodization for pupil imaging scatterometry | Amnon Manassen, Barak Bringoltz, Ohad Bachar, Mark Ghinovker, Zeev Bomzon +1 more | 2017-10-10 |
| 9719920 | Scatterometry system and method for generating non-overlapping and non-truncated diffraction images | Tzahi Grunzweig, Barry Loevsky | 2017-08-01 |
| 9719940 | Compressive sensing with illumination patterning | Amnon Manassen, Avi Abramov | 2017-08-01 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9341769 | Spectral control system | Amnon Manassen, Ohad Bachar, Avi Abramov, Daria Negri | 2016-05-17 |
| 9297769 | Method for reducing aliasing in TDI based imaging | David W. Shortt | 2016-03-29 |
| 9091650 | Apodization for pupil imaging scatterometry | Amnon Manassen, Barak Bringoltz, Ohad Bachar, Mark Ghinovker, Zeev Bomzon +1 more | 2015-07-28 |
| 9080971 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Ohad Bachar +6 more | 2015-07-14 |
| 8947521 | Method for reducing aliasing in TDI based imaging | David W. Shortt | 2015-02-03 |
| 8896832 | Discrete polarization scatterometry | Amnon Manassen, Daniel Kandel, Vladimir Levinski, Joel Seligson, Alexander Svizher +3 more | 2014-11-25 |
| 8873054 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Ohad Bachar +6 more | 2014-10-28 |
| 8441639 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Ohad Bachar +6 more | 2013-05-14 |
| 8073240 | Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer | Verlyn Michael Fischer, Chris Maher, Harish P. Hiriyannaiah, Younus Vora, Ping Ding | 2011-12-06 |
| 7940384 | Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen | Robert M. Danen | 2011-05-10 |
| 7782452 | Systems and method for simultaneously inspecting a specimen with two distinct channels | Courosh Mehanian, Hans J. Hansen, Yingjian Wang, Yuval Ben-Dov, Zheng Li +2 more | 2010-08-24 |
| 7397557 | Serrated Fourier filters and inspection systems | Hwan J. Jeong, Mark Wang | 2008-07-08 |
| 7345754 | Fourier filters and wafer inspection systems | Guoheng Zhao, Mehdi Vaez-Iravani, Avijit K. Ray-Chaudhuri | 2008-03-18 |
| 7304731 | Systems and methods for providing illumination of a specimen for inspection | — | 2007-12-04 |
| 5733489 | Method of producing titanium suboxide articles | — | 1998-03-31 |