Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156846 | High-brightness illumination source for optical metrology | Amnon Manassen, Ohad Bachar, Avi Abramov | 2021-10-26 |
| 11118903 | Efficient illumination shaping for scatterometry overlay | Dmitry Gorelik | 2021-09-14 |
| 11073768 | Metrology target for scanning metrology | Amnon Manassen, Gilad Laredo, Yoel Feler, Mark Ghinovker, Vladimir Levinski | 2021-07-27 |
| 11060845 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Amnon Manassen, Nuriel Amir, Vladimir Levinski +1 more | 2021-07-13 |
| 10976562 | Nano-structured non-polarizing beamsplitter | Dmitry Gorelik, Ohad Bachar, Amnon Manassen, Daria Negri | 2021-04-13 |
| 10976249 | Reflective pupil relay system | Gregory Brady | 2021-04-13 |
| 10684563 | On the fly target acquisition | Amnon Manassen, Nadav Gutman, Yossi Simon, Alexander Novikov, Eugene Maslovsky | 2020-06-16 |
| 10677588 | Localized telecentricity and focus optimization for overlay metrology | Ohad Bachar, Avi Abramov, Yuri Paskover, Dor Perry | 2020-06-09 |
| 10663281 | Systems and methods for optimizing focus for imaging-based overlay metrology | Amnon Manassen | 2020-05-26 |
| 10533940 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2020-01-14 |
| 10527830 | Off-axis reflective afocal optical relay | Gregory Brady | 2020-01-07 |
| 10458777 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Amnon Manassen, Nuriel Amir, Vladimir Levinski +1 more | 2019-10-29 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2019-10-15 |
| 10422508 | System and method for spectral tuning of broadband light sources | Amnon Manassen, Ohad Bachar | 2019-09-24 |
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Amnon Manassen, Yuri Paskover, Yuval Lubashevsky | 2019-09-03 |
| 10401738 | Overlay metrology using multiple parameter configurations | Andrei V. Shchegrov, Amnon Manassen, Noam Sapiens | 2019-09-03 |
| 10371626 | System and method for generating multi-channel tunable illumination from a broadband source | Amnon Manassen, Ohad Bachar | 2019-08-06 |
| 10209183 | Scatterometry system and method for generating non-overlapping and non-truncated diffraction images | Tzahi Grunzweig, Barry Loevsky | 2019-02-19 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Yuri Paskover, Amnon Manassen, Daniel Kandel | 2018-11-27 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-11-13 |
| 10048132 | Simultaneous capturing of overlay signals from multiple targets | Amnon Manassen, Yuri Paskover, Yuval Lubashevsky | 2018-08-14 |
| 10018560 | System and method for hyperspectral imaging metrology | — | 2018-07-10 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-05-01 |
| 9921050 | Spectral control system | Amnon Manassen, Ohad Bachar, Avi Abramov, Daria Negri | 2018-03-20 |