Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393113 | Inter-step feedforward process control in the manufacture of semiconductor devices | Roie Volkovich, Renan Milo, Yoav Grauer, David Izraeli | 2025-08-19 |
| 12347706 | Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein | Roie Volkovich, Renan Milo, Moran Zaberchik, Yoel Feler, David Izraeli | 2025-07-01 |
| 12131959 | Systems and methods for improved metrology for semiconductor device wafers | Daria Negri, Ohad Bachar, Yossi Simon, Amnon Manassen, Nir Ben David +2 more | 2024-10-29 |
| 11971664 | Reducing device overlay errors | Roie Volkovich | 2024-04-30 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2024-01-23 |
| 11784097 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Antonio Mani, Allen Park +3 more | 2023-10-10 |
| 11709433 | Device-like metrology targets | Vladimir Levinski, Amnon Manassen, Eran Amit, Nuriel Amir, Amit Shaked | 2023-07-25 |
| 11644419 | Measurement of properties of patterned photoresist | Roie Volkovich, Amnon Manassen, Yoram Uziel | 2023-05-09 |
| 11635682 | Systems and methods for feedforward process control in the manufacture of semiconductor devices | Roie Volkovich, Achiam Bar | 2023-04-25 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11532566 | Misregistration target having device-scaled features useful in measuring misregistration of semiconductor devices | Roie Volkovich, Raviv Yohanan, Mark Ghinovker | 2022-12-20 |
| 11353799 | System and method for error reduction for metrology measurements | Roie Volkovich, Anna Golotsvan, Rawi Dirawi, Chen Dror, Nir BenDavid +3 more | 2022-06-07 |
| 11355375 | Device-like overlay metrology targets displaying Moiré effects | Roie Volkovich, Raviv Yohanan, Mark Ghinovker | 2022-06-07 |
| 11302544 | Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein | Roie Volkovich, Renan Milo, Moran Zaberchik, Yoel Feler, David Izraeli | 2022-04-12 |
| 11075126 | Misregistration measurements using combined optical and electron beam technology | Roie Volkovich, Nadav Gutman | 2021-07-27 |
| 11054752 | Device metrology targets and methods | Eran Amit, Daniel Kandel, Dror Alumot, Amit Shaked | 2021-07-06 |
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Antonio Mani, Allen Park +3 more | 2021-03-09 |
| 10763146 | Recipe optimization based zonal analysis | Roie Volkovich, Michael Adel, Eitan Herzel, Mengmeng Ye, Eran Amit | 2020-09-01 |
| 10725385 | Optimizing the utilization of metrology tools | Tsachy Holovinger, David Tien, DongSub Choi | 2020-07-28 |
| 10571811 | Device metrology targets and methods | Eran Amit, Daniel Kandel, Dror Alumot, Amit Shaked | 2020-02-25 |
| 10551749 | Metrology targets with supplementary structures in an intermediate layer | Vladimir Levinski, Amnon Manassen, Eran Amit, Nuriel Amir, Amit Shaked | 2020-02-04 |
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, Amnon Manassen, William Pierson, Ady Levy, Pradeep Subrahmanyan +4 more | 2019-09-10 |
| 10331050 | Lithography systems with integrated metrology tools having enhanced functionalities | Eran Amit, Roie Volkovich | 2019-06-25 |
| 10095121 | Optimizing the utilization of metrology tools | Tsachy Holovinger, David Tien, DongSub Choi | 2018-10-09 |