KL

Kin Pong Lo

Applied Materials: 22 patents #582 of 7,310Top 8%
Stanford University: 1 patents #2,251 of 5,197Top 45%
Overall (All Time): #178,074 of 4,157,543Top 5%
23
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12400904 Thermal processing susceptor Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more 2025-08-26
12266560 Film thickness uniformity improvement using edge ring and bias electrode geometry Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more 2025-04-01
12125698 Integrated epitaxy and preclean system Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez 2024-10-22
D1034491 Edge ring Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more 2024-07-09
11927482 Methods for calibrating an optical emission spectrometer Lara Hawrylchak, Malcolm J. Bevan, Theresa Kramer Guarini, Wei Liu, Bernard L. Hwang 2024-03-12
11848226 Thermal processing susceptor Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more 2023-12-19
11380575 Film thickness uniformity improvement using edge ring and bias electrode geometry Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more 2022-07-05
11164737 Integrated epitaxy and preclean system Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez 2021-11-02
11049719 Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal Lara Hawrylchak, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar 2021-06-29
10971357 Thin film treatment process Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more 2021-04-06
10930543 Thermal processing susceptor Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more 2021-02-23
10727093 Light pipe window structure for low pressure thermal processes Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more 2020-07-28
10458040 Upper dome with injection assembly Paul Brillhart, Anzhong Chang, Edric Tong, James Francis Mack, Zhiyuan Ye +5 more 2019-10-29
D858192 Gas distribution plate 2019-09-03
10306708 Absorbing reflector for semiconductor processing chamber Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more 2019-05-28
10269614 Susceptor design to reduce edge thermal peak Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more 2019-04-23
10062598 Thermal processing susceptor Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more 2018-08-28
9845550 Upper dome with injection assembly Paul Brillhart, Anzhong Chang, Edric Tong, James Francis Mack, Zhiyuan Ye +5 more 2017-12-19
9832816 Absorbing reflector for semiconductor processing chamber Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more 2017-11-28
9735002 Integrated apparatus for efficient removal of halogen residues from etched substrates Mark Kawaguchi, Brett Christian Hoogensen, Sandy M. Wen, Steven H. Kim 2017-08-15
9109466 Diffuser with backward facing step having varying step height John K. Eaton 2015-08-18
8313578 Etching chamber having flow equalizer and lower liner James D. Carducci, Kallol Bera, Michael Kutney, Matthew L. Miller 2012-11-20
7655571 Integrated method and apparatus for efficient removal of halogen residues from etched substrates Mark Kawaguchi, Brett Christian Hoogensen, Sandy M. Wen, Steven M. Kim 2010-02-02