Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2025-08-05 |
| 12371781 | In situ protective coating of chamber components for semiconductor processing | David Charles Smith, Karl Leeser | 2025-07-29 |
| 12372872 | Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation | Andrew Xiao Liang, Nader Shamma, Rich Wise, Arpan Mahorowala, Gregory Blachut +1 more | 2025-07-29 |
| 12315724 | Helium-free silicon formation | Zeqiong Zhao, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2025-05-27 |
| 12248252 | Bubble defect reduction | Bart J. van Schravendijk, Girish Dixit, David Charles Smith, Siva Kanakasabapathy | 2025-03-11 |
| 12211908 | Profile shaping for control gate recesses | Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2025-01-28 |
| 11915923 | Method to clean SnO2 film from chamber | Dustin Zachary Austin, Jeongseok Ha, Pei-Chi Liu | 2024-02-27 |
| 11887846 | Deposition tool and method for depositing metal oxide films on organic materials | Patrick A. Van Cleemput | 2024-01-30 |
| 11784229 | Profile shaping for control gate recesses | Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2023-10-10 |
| 11717866 | Etching metal-oxide and protecting chamber components | Dustin Zachary Austin, Alon Ganany, Daniel Boatright | 2023-08-08 |
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Samantha Tan, Shih-Ked Lee, George Matamis, Yongsik Yu +4 more | 2023-06-06 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-05-09 |
| 11031244 | Modification of SNO2 surface for EUV lithography | Nader Shamma, Dustin Zachary Austin | 2021-06-08 |
| 10957514 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2021-03-23 |
| 10840082 | Method to clean SnO2 film from chamber | Dustin Zachary Austin, Jeongseok Ha, Pei-Chi Liu | 2020-11-17 |
| 10763107 | Methods of encapsulation | Bart J. van Schravendijk, Joseph Hung-chi Wei, Bhadri N. Varadarajan, Kevin McLaughlin, Casey Holder +1 more | 2020-09-01 |
| 10566186 | Methods of encapsulation | Bart J. van Schravendijk, Joseph Hung-chi Wei, Bhadri N. Varadarajan, Kevin McLaughlin, Casey Holder +1 more | 2020-02-18 |
| 10373806 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2019-08-06 |
| 10157736 | Methods of encapsulation | Bart J. van Schravendijk, Joseph Hung-chi Wei, Bhadri N. Varadarajan, Kevin McLaughlin, Casey Holder +1 more | 2018-12-18 |
| 10081869 | Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates | Edward Augustyniak, Christopher Ramsayer, Kareem Boumatar | 2018-09-25 |
| 9773643 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2017-09-26 |
| 9617637 | Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems | Arul N. Dhas, Brannon Kelley, Jaswinder Guiliani | 2017-04-11 |
| 9328416 | Method for the reduction of defectivity in vapor deposited films | Arul N. Dhas, Ming Li, Kareem Boumatar | 2016-05-03 |
| 7998881 | Method for making high stress boron-doped carbon films | Qingguo Wu, James S. Sims, Mandyam Sriram, Seshasayee Varadarajan | 2011-08-16 |
| 7327001 | PMOS transistor with compressive dielectric capping layer | James S. Sims, Bhadri N. Varadarajan | 2008-02-05 |