Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283451 | Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber | Vince Burkhart, Mohan Thilagaraj | 2025-04-22 |
| 11488810 | Showerhead shroud | Andrew Borth | 2022-11-01 |
| 11189452 | Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber | Vince Burkhart, Mohan Thilagaraj | 2021-11-30 |
| 10704149 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Arul N. Dhas, Kareem Boumatar | 2020-07-07 |
| 10373794 | Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber | Vince Burkhart, Mohan Thilagaraj | 2019-08-06 |
| 10081869 | Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates | Edward Augustyniak, Akhil Singhal, Kareem Boumatar | 2018-09-25 |
| 10047438 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Arul N. Dhas, Kareem Boumatar | 2018-08-14 |