Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704149 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Arul N. Dhas, Christopher Ramsayer | 2020-07-07 |
| 10081869 | Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates | Edward Augustyniak, Christopher Ramsayer, Akhil Singhal | 2018-09-25 |
| 10047438 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Arul N. Dhas, Christopher Ramsayer | 2018-08-14 |
| 9328416 | Method for the reduction of defectivity in vapor deposited films | Arul N. Dhas, Akhil Singhal, Ming Li | 2016-05-03 |