Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8232646 | Interconnect structure for integrated circuits having enhanced electromigration resistance | Griselda Bonilla, Kaushik Chanda, Ronald G. Filippi, Stephan Grunow, Chao-Kun Hu +2 more | 2012-07-31 |
| 8129269 | Method of improving mechanical properties of semiconductor interconnects with nanoparticles | Junjing Bao, Tien-Jen Cheng | 2012-03-06 |
| 8030707 | Semiconductor structure | Kangguo Cheng, Daewon Yang | 2011-10-04 |
| 7488679 | Interconnect structure and process of making the same | Theodorus E. Standaert, Pegeen M. Davis, John A. Fitzsimmons, Stephen E. Greco, Tze-man Ko +2 more | 2009-02-10 |
| 6933191 | Two-mask process for metal-insulator-metal capacitors and single mask process for thin film resistors | Glenn A. Biery, Zheng Chen, Timothy J. Dalton | 2005-08-23 |
| 6743268 | Chemical-mechanical planarization of barriers or liners for copper metallurgy | William J. Cote, Daniel C. Edelstein | 2004-06-01 |
| 6632377 | Chemical-mechanical planarization of metallurgy | Vlasta Brusic, Daniel C. Edelstein, Paul M. Feeney, William L. Guthrie, Mark A. Jaso +4 more | 2003-10-14 |
| 6573606 | Chip to wiring interface with single metal alloy layer applied to surface of copper interconnect | Carlos J. Sambucetti, Xiaomeng Chen, Soon-Cheon Seo, Birenda Nath Agarwala, Chao-Kun Hu +1 more | 2003-06-03 |
| 6375693 | Chemical-mechanical planarization of barriers or liners for copper metallurgy | William J. Cote, Daniel C. Edelstein | 2002-04-23 |
| 6153043 | Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing | Daniel C. Edelstein, Wilma Jean Horkans, Stephen E. Luce, Keith R. Pope, Peter D. Roper | 2000-11-28 |
| 6020264 | Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing | William L. Guthrie, Thomas E. Sandwick | 2000-02-01 |
| 5633195 | Laser planarization of zone 1 deposited metal films for submicron metal interconnects | William L. Guthrie | 1997-05-27 |
| 5569501 | Diamond-like carbon films from a hydrocarbon helium plasma | Fredric D. Bailey, Douglas A. Buchanan, Alessandro C. Callegari, Howard M. Clearfield, Fuad E. Doany +8 more | 1996-10-29 |
| 5470661 | Diamond-like carbon films from a hydrocarbon helium plasma | Fredric D. Bailey, Douglas A. Buchanan, Alessandro C. Callegari, Howard M. Clearfield, Fuad E. Doany +8 more | 1995-11-28 |
| 5433651 | In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing | Katherine L. Saenger, Ho-Ming Tong | 1995-07-18 |
| 5358899 | Oxygen assisted ohmic contact formation to n-type gallium arsenide | Aaron Fleischman, Robert G. Schad | 1994-10-25 |
| 5337015 | In-situ endpoint detection method and apparatus for chemical-mechanical polishing using low amplitude input voltage | Randall M. Feenstra, William L. Guthrie | 1994-08-09 |
| 5317190 | Oxygen assisted ohmic contact formation to N-type gallium arsenide | Aaron Fleischman, Robert G. Schad | 1994-05-31 |