Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318344 | CMOS structures and methods for improving yield | Huilong Zhu | 2016-04-19 |
| 9080239 | Method and apparatus for angular high density plasma chemical vapor deposition | Kangguo Cheng, Pavel Smetana, Richard S. Wise, Keith Kwong Hon Wong | 2015-07-14 |
| 9016236 | Method and apparatus for angular high density plasma chemical vapor deposition | Kangguo Cheng, Pavel Smetana, Richard S. Wise, Keith Kwong Hon Wong | 2015-04-28 |
| 8679938 | Shallow trench isolation for device including deep trench capacitors | Sunfei Fang, Oleg Gluschenkov, Byeong Y. Kim, Rishikesh Krishnan | 2014-03-25 |
| 8557649 | Method for controlling structure height | Rajasekhar Venigalla, Michael V. Aquilino, Massud Aminpur, Michael P. Belyansky, Unoh Kwon +1 more | 2013-10-15 |
| 8030707 | Semiconductor structure | Kangguo Cheng, Naftali E. Lustig | 2011-10-04 |
| 7943467 | Structure and method to fabricate MOSFET with short gate | Huilong Zhu, Brian J. Greene, Yanfeng Wang | 2011-05-17 |
| 7851376 | Compressive nitride film and method of manufacturing thereof | Woo-Hyeong Lee, Tai-chi Su, Yun-Yu Wang | 2010-12-14 |
| 7804136 | Method of forming nitride films with high compressive stress for improved PFET device performance | Richard A. Conti, Ronald P. Bourque, Nancy R. Klymko, Anita Madan, Michael C. Smits +2 more | 2010-09-28 |
| 7750414 | Structure and method for reducing threshold voltage variation | Huilong Zhu, Yanfeng Wang, Huajie Chen | 2010-07-06 |
| 7615432 | HDP/PECVD methods of fabricating stress nitride structures for field effect transistors | Junjung Kim, Jae-Eun Park, Ja-Hum Ku | 2009-11-10 |
| 7563704 | Method of forming an interconnect including a dielectric cap having a tensile stress | Chih-Chao Yang, Kaushik Chanda, Lawrence A. Clevenger, Yun-Yu Wang | 2009-07-21 |
| 7521307 | CMOS structures and methods using self-aligned dual stressed layers | Huilong Zhu | 2009-04-21 |
| 7521308 | Dual layer stress liner for MOSFETS | Deleep R. Nair, Christopher V. Baiocco, Xiangdong Chen, Junjung Kim, Jae-Eun Park | 2009-04-21 |
| 7514370 | Compressive nitride film and method of manufacturing thereof | Woo-Hyeong Lee, Tai-chi Su, Yun-Yu Wang | 2009-04-07 |
| 7491660 | Method of forming nitride films with high compressive stress for improved PFET device performance | Richard A. Conti, Ronald P. Bourque, Nancy R. Klymko, Anita Madan, Michael C. Smits +2 more | 2009-02-17 |
| 7462527 | Method of forming nitride films with high compressive stress for improved PFET device performance | Richard A. Conti, Ronald P. Bourque, Nancy R. Klymko, Anita Madan, Michael C. Smits +2 more | 2008-12-09 |
| 7179760 | Bilayer cap structure including HDP/bHDP films for conductive metallization and method of making same | Richard A. Conti, Thomas Houghton, Michael F. Lofaro, Jeffery B. Maxson, Ann McDonald +2 more | 2007-02-20 |
| 6914015 | HDP process for high aspect ratio gap filling | Michael P. Belyansky, Patricia Argandona, Gregory DiBello, Andreas Knorr | 2005-07-05 |
| 6911378 | Stabilization of fluorine-containing dielectric materials in a metal insulator wiring structure | Richard A. Conti, Kenneth M. Davis, John A. Fitzsimmons, David L. Rath | 2005-06-28 |