Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7550303 | Systems and methods for overlay shift determination | Faisal Azam, Andrew Lu, Helen Wang | 2009-06-23 |
| 7084427 | Systems and methods for overlay shift determination | Faisal Azam, Andrew Lu, Helen Wang | 2006-08-01 |
| 6914015 | HDP process for high aspect ratio gap filling | Michael P. Belyansky, Gregory DiBello, Andreas Knorr, Daewon Yang | 2005-07-05 |