Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5337015 | In-situ endpoint detection method and apparatus for chemical-mechanical polishing using low amplitude input voltage | Naftali E. Lustig, William L. Guthrie | 1994-08-09 |
| 4550257 | Narrow line width pattern fabrication | Gerd Binnig, Rodney T. Hodgson, Heinrich Rohrer, Jerry M. Woodall | 1985-10-29 |