Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6020264 | Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing | Naftali E. Lustig, William L. Guthrie | 2000-02-01 |
| 5935869 | Method of planarizing semiconductor wafers | Cuc K. Huynh, Rangarajan Jagannathan, Amarnath Jha, Thomas J. Martin, Keith R. Pope | 1999-08-10 |
| 5897425 | Vertical polishing tool and method | Thomas R. Fisher, Jr., Carol E. Gustafson, William Francis Landers, John Carlo Minunni, Jr., Adam D. Ticknor | 1999-04-27 |
| 5640242 | Assembly and method for making in process thin film thickness measurments | Martin P. O'Boyle, John Charles Panner, Theodore G. van Kessel, Hemantha K. Wickramasinghe | 1997-06-17 |
| 5262354 | Refractory metal capped low resistivity metal conductor lines and vias | William J. Cote, Pei-Ing Lee, Bernd Vollmer, Victor Vynorius, Stuart H. Wolff | 1993-11-16 |