Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6186864 | Method and apparatus for monitoring polishing pad wear during processing | Mark A. Jaso, Leonard C. Stevens, Jr. | 2001-02-13 |
| 6045434 | Method and apparatus of monitoring polishing pad wear during processing | Mark A. Jaso, Leonard C. Stevens, Jr. | 2000-04-04 |
| 6030487 | Wafer carrier assembly | Carol E. Gustafson, Michael F. Lofaro | 2000-02-29 |
| 5897425 | Vertical polishing tool and method | Carol E. Gustafson, William Francis Landers, John Carlo Minunni, Jr., Thomas E. Sandwick, Adam D. Ticknor | 1999-04-27 |
| 5676587 | Selective polish process for titanium, titanium nitride, tantalum and tantalum nitride | William Francis Landers, Matthew J. Rutten, Dean Allen Schaffer | 1997-10-14 |