Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454089 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2016-09-27 |
| 9442395 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2016-09-13 |
| 9423699 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2016-08-23 |
| 9410796 | Lithographic apparatus and method | Ruud Antonius Catharina Maria Beerens, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee | 2016-08-09 |
| 9389518 | Stage system and a lithographic apparatus | Antonius Franciscus Johannes De Groot, Yang-Shan Huang, Sander Christiaan Broers, Peter Laurentius Maria Ros | 2016-07-12 |
| 9354528 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Jan Bex, Nicolaas Ten Kate, Johannes Wilhelmus Damen, Eugene Maria Brinkhof, Yogesh Pramod Karade | 2016-05-31 |
| 9316927 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2016-04-19 |
| 9298104 | Substrate holder, lithographic apparatus, and device manufacturing method | Siegfried Alexander Tromp, Nicolaas Ten Kate | 2016-03-29 |
| 9298107 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Koen Steffens, Takeshi Kaneko +5 more | 2016-03-29 |
| 9268238 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2016-02-23 |
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2016-02-09 |
| 9013683 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2015-04-21 |
| 8947640 | Positioning device, lithographic apparatus, positioning method and device manufacturing method | Henrikus Herman Marie Cox, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen | 2015-02-03 |
| 8941815 | Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method | Jozef Petrus Henricus Benschop, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Gerardus Adrianus Antonius Maria Kusters, Alexander Nikolov Zdravkov +2 more | 2015-01-27 |
| 8908143 | Substrate holder, lithographic apparatus, and device manufacturing method involving a heater and/or temperature sensor | Siegfried Alexander Tromp, Nicolaas Ten Kate | 2014-12-09 |
| 8902400 | Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus | Michel Riepen, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers, Fabrizio Evangelista | 2014-12-02 |
| 8830441 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Theodorus Petrus Maria Cadee | 2014-09-09 |
| 8767169 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov | 2014-07-01 |
| 8659742 | Lithographic apparatus and a device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Alexander Nikolov Zdravkov | 2014-02-25 |
| 8593646 | Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Marcel Hendrikus Maria Beems, Theodorus Petrus Maria Cadee | 2013-11-26 |
| 8579625 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Raymond Jacobus Wilhelmus Knaapen, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram | 2013-11-12 |
| 8553206 | Lithographic apparatus, coverplate and device manufacturing method | Nicolaas Ten Kate, Laurentius Johannes Adrianus Van Bokhoven, Henricus Jozef Castelijns | 2013-10-08 |
| 8477250 | Circular displays | Nicolaas Willem Schellingerhout, Kenny Darmadji, Hjalmar Edzer Ayco Huitema | 2013-07-02 |
| 8405819 | Immersion lithographic apparatus and device manufacturing method | Laurentius Johannes Adrianus Van Bokhoven, Nicolaas Ten Kate, Henricus Jozef Castelijns, Petrus Martinus Gerardus Johannes Arts | 2013-03-26 |
| 8199471 | Rollable display device | David Johannes Elisabeth Bemelmans, Kenny Darmadji, Edzer Huitema, Nicolaas Willem Schellingerhout | 2012-06-12 |