| 11149352 |
Method and apparatus for depositing atomic layers on a substrate |
Ruud Olieslagers, Dennis Van Den Berg, Matijs C. van den Boer, Freddy Roozeboom |
2021-10-19 |
| 10654217 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram, Raymond Wilhelmus Louis Lafarre |
2020-05-19 |
| 10428423 |
Method and apparatus for depositing atomic layers on a substrate |
Paulus Willibrordus George Poodt |
2019-10-01 |
| 9889597 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram, Raymond Wilhelmus Louis Lafarre |
2018-02-13 |
| 9610727 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Aleksey Yurievich Kolesnychenko, Karel Diederick Van Der Mast, Klaus Simon +2 more |
2017-04-04 |
| 9567671 |
Method and apparatus for depositing atomic layers on a substrate |
Ruud Olieslagers, Dennis Van Den Berg, Matijs C. van den Boer, Diederik Jan Maas, Jacques Cor Johan Van Der Donck +1 more |
2017-02-14 |
| 8753557 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Aleksey Yurievich Kolesnychenko, Karel Diederick Van Der Mast, Klaus Simon +2 more |
2014-06-17 |
| 8579625 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram, Raymond Wilhelmus Louis Lafarre |
2013-11-12 |
| 8100684 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Aleksey Yurievich Kolesnychenko, Karel Diederick Van Der Mast, Klaus Simon +2 more |
2012-01-24 |
| 7943080 |
Alignment for imprint lithography |
Johan Frederik Dijksman, Krassimir Todorov Krastev, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Ivar Schram |
2011-05-17 |
| 7628875 |
MEMS device and assembly method |
Jan Bex, Gerard Johannes Pieter Nijsse, Gerard Kums |
2009-12-08 |
| 7517211 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johan Frederik Dijksman, Krassimir Todorov Krastev, Sander Frederik Wuister, Aleksey Yurievich Kolesnychenko +2 more |
2009-04-14 |