Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor, Michael Andrew Chieda +1 more | 2019-06-18 |
| 10254660 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2019-04-09 |
| 10245641 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2019-04-02 |
| 10236203 | Lithographic apparatus substrate table and method of loading a substrate | Mahdiar Valefi | 2019-03-19 |
| 10203612 | Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus | Takeshi Kaneko, Joost Jeroen Ottens | 2019-02-12 |
| RE47237 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov | 2019-02-12 |
| 10203611 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Koen Steffens, Takeshi Kaneko +5 more | 2019-02-12 |
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Tiannan GUAN, Ilya MALAKHOVSKY, Bas Johannes Petrus ROSET, Siegfried Alexander Tromp +1 more | 2019-01-29 |
| 10126663 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2018-11-13 |
| 10120292 | Support apparatus, lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more | 2018-11-06 |
| 10018924 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2018-07-10 |
| 10001713 | Lithographic apparatus and method | Santiago del Puerto, Matthew Lipson, Kenneth C. Henderson, Louis John Markoya, Tammo Uitterdijk +3 more | 2018-06-19 |
| 9989867 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2018-06-05 |
| 9927715 | Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov | 2018-03-27 |
| 9915877 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Koen Steffens +8 more | 2018-03-13 |
| 9889597 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Raymond Jacobus Wilhelmus Knaapen, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram | 2018-02-13 |
| 9857696 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2018-01-02 |
| 9823589 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Koen Steffens, Takeshi Kaneko +5 more | 2017-11-21 |
| 9798251 | Object holder, lithographic apparatus, device manufacturing method, and method of manufacturing an object holder | Satish Achanta, Matteo Filippi, Yogesh Paramod KARADE, Antonius Johannes Maria Nellissen, Ronald Van Der Wilk +2 more | 2017-10-24 |
| 9785055 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Koen Steffens +8 more | 2017-10-10 |
| 9737934 | Substrate holder and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2017-08-22 |
| 9678445 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2017-06-13 |
| 9507275 | Support apparatus, lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more | 2016-11-29 |
| 9507274 | Substrate holder and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2016-11-29 |
| 9488919 | Substrate table, a lithographic apparatus and a method involving an encoder plate | Takeshi Kaneko, Joost Jeroen Ottens | 2016-11-08 |