Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014925 | Metal-doped carbon hardmasks | Eswaranand Venkatasubramanian, Bhaskar Jyoti Bhuyan, Abhijit Basu Mallick | 2024-06-18 |
| 11990332 | Methods and apparatus for deposition of low-k films | Bhaskar Jyoti Bhuyan, Zhelin Sun, Ning Li, Mihaela Balseanu, Li-Qun Xia +2 more | 2024-05-21 |
| 11972940 | Area selective carbon-based film deposition | Xinke Wang, Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick +2 more | 2024-04-30 |
| 11970777 | Deposition of low-k films | Shuaidi Zhang, Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Thomas Knisley | 2024-04-30 |
| 11942330 | Methods for selective dry etching gallium oxide | Feng Q. Liu, Lisa J. Enman, Lakmal C. Kalutarage | 2024-03-26 |
| 11932940 | Silyl pseudohalides for silicon containing films | Keenan N. Woods, Cong Trinh, Mihaela Balseanu, Maribel Maldonado-Garcia, Lisa J. Enman | 2024-03-19 |
| 11932938 | Corrosion resistant film on a chamber component and methods of depositing thereof | Lisa J. Enman, Steven Marcus, Lei Zhou | 2024-03-19 |
| 11891690 | Molybdenum thin films by oxidation-reduction | Feng Q. Liu, Alexander Jansen | 2024-02-06 |
| 11886120 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2024-01-30 |
| 11866824 | Homoleptic lanthanide deposition precursors | Thomas Knisley | 2024-01-09 |
| 11859278 | Molecular layer deposition of amorphous carbon films | Bhaskar Jyoti Bhuyan, Ahbijit Basu Mallick, Eugene Yu Jin Kong, Bo Qi | 2024-01-02 |
| 11848229 | Selective blocking of metal surfaces using bifunctional self-assembled monolayers | Michael L. McSwiney, Bhaskar Jyoti Bhuyan, Drew Phillips, Aaron Dangerfield, David Thompson +2 more | 2023-12-19 |
| 11823893 | Methods of depositing SiCON with C, O, and N compositional control | David Thompson, Thomas Knisley, Bhaskar Jyoti Bhuyan | 2023-11-21 |
| 11821085 | Methods of selective atomic layer deposition | Bhaskar Jyoti Bhuyan, David Thompson, Tobin Kaufman-Osborn, Kurt Fredrickson, Thomas Knisley +1 more | 2023-11-21 |
| 11760768 | Molybdenum(0) precursors for deposition of molybdenum films | Chandan Kr Barik, John Sudijono, Chandan Das, Doreen Wei Ying Yong, Bhaskar Jyoti Bhuyan +1 more | 2023-09-19 |
| 11732356 | Multilayer encapsulation stacks by atomic layer deposition | Cong Trinh, Mihaela Balseanu, Maribel Maldonado-Garcia, Ning Li, Bhaskar Jyoti Bhuyan +2 more | 2023-08-22 |
| 11702733 | Methods for depositing blocking layers on conductive surfaces | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Aaron Dangerfield, Feng Q. Liu, Michael Haverty +1 more | 2023-07-18 |
| 11697879 | Methods for depositing sacrificial coatings on aerospace components | Sukti Chatterjee, Kenichi Ohno, Lance A. Scudder, Yuriy Melnik, David Alexander BRITZ +3 more | 2023-07-11 |
| 11649560 | Method for forming silicon-phosphorous materials | Errol Antonio C. Sanchez, Schubert S. Chu, Abhishek Dube, Srividya Natarajan | 2023-05-16 |
| 11621172 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed | 2023-04-04 |
| 11603767 | Methods of protecting metallic components against corrosion using chromium-containing thin films | Thomas Knisley, David Alexander BRITZ, David Thompson | 2023-03-14 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus +6 more | 2023-02-14 |
| 11560804 | Methods for depositing coatings on aerospace components | Yuriy Melnik, Sukti Chatterjee, Kaushal Gangakhedkar, Jonathan Frankel, Lance A. Scudder +4 more | 2023-01-24 |
| 11562904 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2023-01-24 |
| 11549181 | Methods for atomic layer deposition of SiCO(N) using halogenated silylamides | Bhaskar Jyoti Bhuyan | 2023-01-10 |