Issued Patents All Time
Showing 76–89 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355106 | Deposition of copper with increased adhesion | Bo Zheng, Alfred Mak, Mei Chang | 2002-03-12 |
| 6319728 | Method for treating a deposited film for resistivity reduction | Mohan K. Bhan, Bo Zheng, Justin Jones, Seshadri Ganguli, Timothy E. Levine +2 more | 2001-11-20 |
| 6309713 | Deposition of tungsten nitride by plasma enhanced chemical vapor deposition | Alfred Mak, David Charles Smith, Mei Chang, Steve Ghanayem | 2001-10-30 |
| 6291343 | Plasma annealing of substrates to improve adhesion | Jennifer Meng Chu Tseng, Mei Chang, David Charles Smith, Karl A. Littau, Chyi Chern +1 more | 2001-09-18 |
| 6276295 | Thermal reflow method employing microwave energy | Steven T. Li | 2001-08-21 |
| 6171661 | Deposition of copper with increased adhesion | Bo Zheng, Alfred Mak, Mei Chang | 2001-01-09 |
| 6110530 | CVD method of depositing copper films by using improved organocopper precursor blend | Seshadri Ganguli, Bo Zheng, Samuel Wilson, Christophe Marcadal | 2000-08-29 |
| 6099649 | Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal | John V. Schmitt, George Michael Bleyle, Yu D. Cong, Alfred Mak, Mei Chang | 2000-08-08 |
| 6063440 | Method for aligning a wafer | Joseph Yudovsky, Ying Yu, Lawrence Chung-Lai Lei | 2000-05-16 |
| 6050506 | Pattern of apertures in a showerhead for chemical vapor deposition | Xin Sheng Guo, Keith Kuang-Kuo Koai, Mohan K. Bhan, Bo Zheng | 2000-04-18 |
| 5989999 | Construction of a tantalum nitride film on a semiconductor wafer | Timothy E. Levine, Mei Chang, Roderick C. Mosely, Karl A. Littau, Ivo Raaijmakers | 1999-11-23 |
| 5858464 | Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers | Karl A. Littau, Dashun Steve Zhou, Alfred Mak | 1999-01-12 |
| 5740009 | Apparatus for improving wafer and chuck edge protection | Bryan Pu, Hongching Shan, Kuang-Han Ke, Michael Welch, Semyon Sherstinsky +4 more | 1998-04-14 |
| 5673922 | Apparatus for centering substrates on support members | Semyon Sherstinsky, Alfred Mak, Leonel A. Zuniga | 1997-10-07 |