Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404314 | Metal line patterning | Sony Varghese, M. Arif Zeeshan, Shantanu Kallakuri | 2022-08-02 |
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Xinliang Lu, Srinivas Gandikota, Yong Wu, Susmit Singha Roy +1 more | 2022-03-29 |
| 11174551 | Methods for depositing tungsten on halosilane based metal silicide nucleation layers | Yihong Chen | 2021-11-16 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 |
| 11094533 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Atashi Basu, Abhijit Basu Mallick | 2021-08-17 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 |
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Hanhong Chen +1 more | 2021-04-20 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Abhijit Basu Mallick | 2021-01-05 |
| 10854461 | Tungsten deposition without barrier layer | Yihong Chen, Yong Wu, Chia Cheng Chin, Srinivas Gandikota | 2020-12-01 |
| 10840086 | Plasma enhanced CVD with periodic high voltage bias | Travis Koh, Simon Huang, Philip Allan Kraus | 2020-11-17 |
| 10790141 | Surface-selective atomic layer deposition using hydrosilylation passivation | Yihong Chen, Abhijit Basu Mallick | 2020-09-29 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2020-08-11 |
| 10626454 | Compositions and methods for nucleic acid amplification and analysis | Victor Hum, Danny Lee | 2020-04-21 |
| 10622251 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Abhijit Basu Mallick | 2020-04-14 |
| 10571244 | Measuring surface roughness | Murukeshan Vadakke Matham, Guru Prasad Arudi Subbarao, Prabhathan PATINHAREKANDY, Aswin HARIDAS, Pulkit KAPUR | 2020-02-25 |
| 10475642 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Srinivas Gandikota, Atashi Basu, Abhijit Basu Mallick | 2019-11-12 |
| 10410869 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick, Srinivas Gandikota +1 more | 2019-09-10 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2019-09-10 |
| 10354916 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Ziqing Duan, Abhijit Basu Mallick | 2019-07-16 |
| 10319624 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2019-06-11 |
| 10128150 | Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2018-11-13 |
| 10113234 | UV assisted silylation for porous low-k film sealing | Bo Xie, Alexandros T. Demos, Vu Ngoc Tran Nguyen, He Ren, Kang Sub Yim +1 more | 2018-10-30 |
| 10002757 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Shaunak Mukherjee, Abhijit Basu Mallick | 2018-06-19 |
| 9978685 | Conformal amorphous silicon as nucleation layer for W ALD process | Yihong Chen, Srinivas Gandikota | 2018-05-22 |
| 9741558 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Shaunak Mukherjee, Abhijit Basu Mallick | 2017-08-22 |