Issued Patents All Time
Showing 26–50 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456197 | Systems and methods for providing maintenance access to electronic device manufacturing tools | Michael R. Rice, Juan Carlos Rocha-Alvarez | 2022-09-27 |
| 11413767 | Sensor-based position and orientation feedback of robot end effector with respect to destination chamber | Preetham Kariyaiah Shivanna, Paul Z. Wirth | 2022-08-16 |
| 11370114 | Autoteach enclosure system | Nicholas Michael Kopec, Lyle Kosinski, Matvey Farber | 2022-06-28 |
| 11358809 | Vacuum robot apparatus for variable pitch access | Rajkumar Thanu, Karuppasamy Muthukamatchi | 2022-06-14 |
| 11353381 | Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room | Devendra Channappa Holeyannavar, Dean C. Hruzek, Arunkumar Ramachandraiah, Shivaraj Manjunath Nara, Paul B. Reuter | 2022-06-07 |
| 11244846 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Michael R. Rice, Karuppasamy Muthukamatchi, Nir Merry | 2022-02-08 |
| 11232965 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more | 2022-01-25 |
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more | 2021-12-14 |
| 11018036 | Carrier adapter insert apparatus and carrier adapter insert detection methods | John Mazzocco, Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar | 2021-05-25 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more | 2021-03-30 |
| 10943805 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Michael R. Rice, Karuppasamy Muthukamatchi, Nir Merry | 2021-03-09 |
| 10850390 | Dual robot including spaced upper arms and interleaved wrists and systems and methods including same | Karuppasamy Muthukamatchi, Damon K. Cox | 2020-12-01 |
| 10847391 | Semiconductor device manufacturing platform with single and twinned processing chambers | Nir Merry, Michael R. Rice, Sushant S. Koshti | 2020-11-24 |
| 10814475 | Dual robot including spaced upper arms and interleaved wrists and systems and methods including same | Karuppasamy Muthukamatchi, Damon K. Cox | 2020-10-27 |
| 10758045 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Izya Kremerman +1 more | 2020-09-01 |
| 10595415 | Electronic device manufacturing system | Michael R. Rice | 2020-03-17 |
| 10553469 | Sealed substrate carriers and systems and methods for transporting substrates | Michael R. Rice | 2020-02-04 |
| 10537997 | Sensor based auto-calibration wafer | Narayanan Ramachandran, Karthik Balakrishnan, Rajkumar Thanu | 2020-01-21 |
| 10500719 | Dual robot including spaced upper arms and interleaved wrists and systems and methods including same | Karuppasamy Muthukamatchi, Damon K. Cox | 2019-12-10 |
| 10427303 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman +4 more | 2019-10-01 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Izya Kremerman +1 more | 2019-05-07 |
| 10234261 | Fast and continuous eddy-current metrology of a conductive film | Edward W. Budiarto, Dmitry A. Dzilno, Todd Egan, Nir Merry | 2019-03-19 |
| 10199256 | Methods and systems for improved mask processing | Edward Ng, Ayan Majumdar, Sushant S. Koshti | 2019-02-05 |
| 10115616 | Carrier adapter insert apparatus and carrier adapter insert detection methods | John Mazzocco, Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar | 2018-10-30 |
| 10071887 | Universal component lift apparatus, assemblies, and methods for electronic device manufacturing | Alpay Yilmaz | 2018-09-11 |