Issued Patents All Time
Showing 51–75 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905447 | Sealed substrate carriers and systems and methods for transporting substrates | Michael R. Rice | 2018-02-27 |
| 9717147 | Electronic device manufacturing system | Michael R. Rice | 2017-07-25 |
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Nir Merry, Chandrakant M. Sapkale, Izya Kremerman | 2016-12-27 |
| 9457464 | Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing | Izya Kremerman | 2016-10-04 |
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Nir Merry, Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Penchala N. Kankanala | 2016-08-30 |
| 9334127 | Systems, apparatus and methods for transporting substrates in electronic device manufacturing | Izya Kremerman | 2016-05-10 |
| 9325228 | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing | Izya Kremerman, Jeffrey A. Brodine, Damon K. Cox | 2016-04-26 |
| 9296105 | Vibration-controlled substrate handling robots, systems, and methods | Nir Merry, Alex Minkovich, Brendan Till | 2016-03-29 |
| 9281222 | Wafer handling systems and methods | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman +4 more | 2016-03-08 |
| 9177842 | Degassing apparatus adapted to process substrates in multiple tiers with second actuator | Eric A. Englhardt, Richard Giljum, Igor Kogan, Michael R. Rice, Sushant S. Koshti | 2015-11-03 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice +5 more | 2015-09-29 |
| 9117865 | Robot systems, apparatus, and methods having independently rotatable waists | Izya Kremerman | 2015-08-25 |
| 9076830 | Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm | Izya Kremerman, Damon K. Cox | 2015-07-07 |
| 9076829 | Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing | Jeffrey A. Brodine, Izya Kremerman | 2015-07-07 |
| 9033644 | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub | Izya Kremerman, Jeffrey A. Brodine | 2015-05-19 |
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2014-12-16 |
| 8870512 | Sealed substrate carriers and systems and methods for transporting substrates | Michael R. Rice | 2014-10-28 |
| 8784033 | Robot systems, apparatus and methods for transporting substrates | Izya Kremerman | 2014-07-22 |
| 8777547 | Systems, apparatus and methods for transporting substrates | Izya Kremerman | 2014-07-15 |
| 8689812 | Methods and loadport for purging a substrate carrier | Vinay Shah, Eric A. Englhardt, Martin R. Elliott | 2014-04-08 |
| 8672121 | Methods and apparatus for transporting substrate carriers | Vinay Shah | 2014-03-18 |
| 8601975 | Methods and loadport apparatus for purging a substrate carrier | Vinay Shah, Eric A. Englhardt, Martin R. Elliott | 2013-12-10 |
| 8599531 | Electrostatic end effector apparatus, systems and methods | Satish Sundar, Prudhvi R. Chintalapati, William Taylor, William P. Laceky, Jeffrey A. Brodine +2 more | 2013-12-03 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2013-10-08 |
| 8322963 | End effector for a cluster tool | Jagan Rangarajan, Michael R. Rice, Penchala N. Kankanala | 2012-12-04 |