Issued Patents All Time
Showing 101–125 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2010-01-26 |
| 7611319 | Methods and apparatus for identifying small lot size substrate carriers | Vinay Shah, Martin R. Elliott, Eric A. Englhardt | 2009-11-03 |
| 7611318 | Overhead transfer flange and support for suspending a substrate carrier | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Eric A. Englhardt | 2009-11-03 |
| 7597183 | Kinematic pin with shear member and substrate carrier for use therewith | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2009-10-06 |
| 7594789 | Overhead transfer flange and support for suspending a substrate carrier | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Eric A. Englhardt | 2009-09-29 |
| 7578647 | Load port configurations for small lot size substrate carriers | Martin R. Elliott, Michael R. Rice, Eric A. Englhardt, Victor Belitsky | 2009-08-25 |
| 7577487 | Methods and apparatus for a band to band transfer module | Robert B. Lowrance, Eric A. Englhardt, Michael R. Rice, Vinay Shah, Sushant S. Koshti | 2009-08-18 |
| 7552816 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2009-06-30 |
| 7540371 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2009-06-02 |
| 7537108 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2009-05-26 |
| 7527141 | System for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2009-05-05 |
| 7506746 | System for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2009-03-24 |
| 7506752 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2009-03-24 |
| 7506747 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2009-03-24 |
| 7503448 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2009-03-17 |
| 7455172 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2008-11-25 |
| 7433756 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Kirk Van Katwyk +1 more | 2008-10-07 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2008-05-20 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2008-05-20 |
| 7367446 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2008-05-06 |
| 7359767 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Eric A. Englhardt | 2008-04-15 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 7346431 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyer | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Eric A. Englhardt | 2008-03-18 |
| 7299831 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Eric A. Englhardt | 2007-11-27 |
| 7293642 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2007-11-13 |