Issued Patents All Time
Showing 126–145 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7274971 | Methods and apparatus for electronic device manufacturing system monitoring and control | Todd James Brill, Michael Teferra, Amitabh Puri | 2007-09-25 |
| 7258520 | Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing | Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Eric A. Englhardt, Loy Randall Stuart | 2007-08-21 |
| 7243003 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Eric A. Englhardt | 2007-07-10 |
| 7234584 | System for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2007-06-26 |
| 7230702 | Monitoring of smart pin transition timing | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Kirk Van Katwyk +1 more | 2007-06-12 |
| 7221993 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Robert B. Lowrance | 2007-05-22 |
| 7168553 | Dynamically balanced substrate carrier handler | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2007-01-30 |
| 7156221 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2007-01-02 |
| 7077264 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2006-07-18 |
| 7051870 | Suspension track belt | Rudolph Schoendienst, Willi Fuelleman | 2006-05-30 |
| 7039501 | Method for determining a position of a robot | Marvin L. Freeman, Damon K. Cox, Chris Pencis, Michael R. Rice, David A. Van Gogh | 2006-05-02 |
| 6955197 | Substrate carrier having door latching and substrate clamping mechanisms | Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Eric A. Englhardt | 2005-10-18 |
| 6709218 | Robot blade for semiconductor processing equipment | Frederik W. Freerks, Tetsuya Ishikawa, Timothy Wang, James R. Ciulik, Mohsen Salek +2 more | 2004-03-23 |
| 6582175 | Robot for handling semiconductor wafers | Damon K. Cox, Martin R. Elliott, Chris Pencis, Michael R. Rice | 2003-06-24 |
| 6573522 | Locator pin integrated with sensor for detecting semiconductor substrate carrier | Martin R. Elliott | 2003-06-03 |
| 6556887 | Method for determining a position of a robot | Marvin L. Freeman, Damon K. Cox, Chris Pencis, Michael R. Rice, David A. Van Gogh | 2003-04-29 |
| 6379095 | Robot for handling semiconductor wafers | Martin R. Elliott, Chris Pencis, Damon K. Cox | 2002-04-30 |
| 6222337 | Mechanically clamping robot wrist | Tony R. Kroeker | 2001-04-24 |
| 6056504 | Adjustable frog-leg robot | Tony R. Kroeker | 2000-05-02 |
| 5955858 | Mechanically clamping robot wrist | Tony R. Kroeker | 1999-09-21 |