Issued Patents All Time
Showing 76–100 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 8123881 | Die-to-robot alignment for die-to-substrate bonding | Damon K. Cox, Todd Egan, Michael Yang | 2012-02-28 |
| 8078304 | Dual-mode robot systems and methods for electronic device manufacturing | Michael R. Rice, Todd Egan, Ingrid B. Peterson | 2011-12-13 |
| 8074597 | Methods and apparatus for purging a substrate carrier | Vinay Shah, Eric A. Englhardt, Martin R. Elliott | 2011-12-13 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2011-11-29 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliot | 2011-09-20 |
| 8016542 | Methods and apparatus for extending the reach of a dual scara robot linkage | Damon K. Cox, Marvin L. Freeman, Jason M. Schaller, Jeffrey A. Brodine | 2011-09-13 |
| 7984543 | Methods for moving a substrate carrier | Martin R. Elliott, Vinay Shah, Eric A. Englhardt | 2011-07-26 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Michael R. Rice, Eric A. Englhardt, Kirk Van Katwyk | 2011-04-19 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Kirk Van Katwyk +1 more | 2011-03-22 |
| 7857570 | Method and apparatus for supplying substrates to a processing tool | Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Eric A. Englhardt | 2010-12-28 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Michael R. Rice, Steve Hongkham, Jay D. Pinson, II, Mohsen Salek +3 more | 2010-10-26 |
| 7798309 | Stabilizing substrate carriers during overhead transport | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2010-09-21 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Charles T. Carlson, William T. Weaver, Robert B. Lowrance, Eric A. Englhardt +6 more | 2010-09-21 |
| 7792608 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Eric A. Englhardt | 2010-09-07 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7711445 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Robert B. Lowrance | 2010-05-04 |
| 7694688 | Wet clean system design | Paul Lester, Scott Meyer, Wyland L. Atkins, Douglas Richards, Constantin Predoaica +6 more | 2010-04-13 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7688017 | Multi-axis vacuum motor assembly | — | 2010-03-30 |
| 7684895 | Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott | 2010-03-23 |
| 7673735 | System for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Eric A. Englhardt | 2010-03-09 |