Issued Patents 2021
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11212903 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Chun-Lin Chang, Han-Lung Chang | 2021-12-28 |
| 11204556 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Che-Chang Hsu, Po-Chung Cheng | 2021-12-21 |
| 11172566 | Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator | Jen-Hung Hsiao, Po-Chung Cheng, Shang-Chieh Chien | 2021-11-09 |
| 11166361 | Method and device for measuring contamination in EUV source | Kuan-Hung Chen, Shang-Chieh Chien, Po-Chung Cheng | 2021-11-02 |
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen +2 more | 2021-10-26 |
| 11150564 | EUV wafer defect improvement and method of collecting nonconductive particles | Tao Chen, Chia-Yu Lee | 2021-10-19 |
| 11150561 | Method and apparatus for collecting information used in image-error compensation | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2021-10-19 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Shang-Chieh Chien, Yen-Shuo Su, Chieh Hsieh +1 more | 2021-10-19 |
| 11153958 | Extreme ultraviolet photolithography method | Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Po-Chung Cheng | 2021-10-19 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Po-Chung Cheng +1 more | 2021-09-14 |
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2021-08-17 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang +1 more | 2021-08-10 |
| 11086237 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Che-Chang Hsu, Chi-Ming Yang | 2021-08-10 |
| 11086209 | EUV lithography mask with a porous reflective multilayer structure | Chih-Tsung Shih, Shih-Chang Shih, Po-Chung Cheng | 2021-08-10 |
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Chi YANG, Sheng-Ta Lin, Shang-Chieh Chien, Po-Chung Cheng | 2021-07-20 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Po-Chung Cheng, Hsiao-Lun Chang, Han-Lung Chang | 2021-07-20 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Hsiao-Lun Chang, Po-Chung Cheng | 2021-06-08 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2021-06-08 |
| 11029613 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Chia-Chen Chen | 2021-06-08 |
| 11024623 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2021-06-01 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2021-05-18 |
| 11003067 | Pressurized tin collection bucket with in-line draining mechanism | Chi-Ming Yang, Hsin-Feng Chen | 2021-05-11 |
| 10997706 | Reticle backside inspection method | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Shih-Chang Shih | 2021-05-04 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2021-04-27 |