Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su, Chieh Hsieh +1 more | 2021-10-19 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-04-27 |
| 10925142 | EUV radiation source for lithography exposure process | Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-02-16 |