Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2021-08-17 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen +1 more | 2021-05-18 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-04-27 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-04-13 |
| 10976674 | Method for detecting EUV pellicle rupture | Chih-Tsung Shih, Tsung Chuan Lee | 2021-04-13 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2021-03-23 |
| 10928741 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-02-23 |
| 10917959 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng | 2021-02-09 |