Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119420 | Particle prevention method in lithography exposure apparatus | Yi-Wei Lee, Jui-Chieh Chen, Chih-Tsung Shih | 2021-09-14 |
| 10976674 | Method for detecting EUV pellicle rupture | Chih-Tsung Shih, Bo-Tsun Liu | 2021-04-13 |