YL

Yi-Wei Lee

TSMC: 1 patents #1,794 of 3,494Top 55%
Overall (2021): #202,430 of 548,734Top 40%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11119420 Particle prevention method in lithography exposure apparatus Jui-Chieh Chen, Chih-Tsung Shih, Tsung Chuan Lee 2021-09-14