Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11212903 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Li-Jui Chen, Han-Lung Chang | 2021-12-28 |
| 11199767 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu | 2021-12-14 |
| 11092555 | EUV vessel inspection method and related system | Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2021-08-17 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-04-13 |
| 10917959 | EUV radiation modification methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2021-02-09 |