Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199767 | Apparatus and method for generating an electromagnetic radiation | Feng Yuan Hsu, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu, Chun-Lin Chang | 2021-12-14 |
| 11107672 | Method of manufacturing semiconductor device and method of cleaning substrate | — | 2021-08-31 |
| 11037792 | Semiconductor structure etching solution and method for fabricating a semiconductor structure using the same etching solution | — | 2021-06-15 |
| 11004746 | Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure | Chi-Ming Yang, Chyi Shyuan Chern | 2021-05-11 |
| 10971353 | Method for dehydrating semiconductor structure and dehydrating method of the same | — | 2021-04-06 |
| 10957529 | Method for drying wafer with gaseous fluid | — | 2021-03-23 |