Issued Patents 2021
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204556 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Che-Chang Hsu, Li-Jui Chen, Po-Chung Cheng | 2021-12-21 |
| 11199767 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Tsiao-Chen Wu, Chun-Lin Chang | 2021-12-14 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su +1 more | 2021-10-19 |
| 11153957 | Apparatus and method for generating an electromagnetic radiation | Tzu-Jeng Hsu, Chyi Shyuan Chern, Jui-Chun Peng, Heng-Hsin Liu, Chin-Hsiang Lin | 2021-10-19 |
| 11125968 | Optical module | Hui Wang | 2021-09-21 |
| 11086237 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu | 2021-08-10 |
| 11075097 | 3D IC bump height metrology APC | Nai-Han Cheng | 2021-07-27 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |
| 11004746 | Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure | Chung-Chieh Lee, Chyi Shyuan Chern | 2021-05-11 |
| 11003067 | Pressurized tin collection bucket with in-line draining mechanism | Hsin-Feng Chen, Li-Jui Chen | 2021-05-11 |
| 10990026 | Lithography apparatus and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-04-27 |
| 10991604 | Method of manufacturing semiconductor structure | Jyh-Shiou Hsu, Tzu-Jeng Hsu | 2021-04-27 |
| 10955750 | Lithography system and method thereof | Wei-Chun Yen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-03-23 |