Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081315 | Ion impantation gas supply system | Hsing-Piao Hsu, Ping-Chih Ou | 2021-08-03 |
| 11075097 | 3D IC bump height metrology APC | Chi-Ming Yang | 2021-07-27 |
| 11060980 | Broadband wafer defect detection | Hsing-Piao Hsu | 2021-07-13 |