Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Chi YANG, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-07-20 |
| 11054934 | Electronic device | Chih-Wen Hsieh | 2021-07-06 |
| 10990026 | Lithography apparatus and cleaning method thereof | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-04-27 |
| 10942459 | Lithography system and cleaning method thereof | Li-Jui Chen, Shang-Chieh Chien | 2021-03-09 |