Issued Patents 2021
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204556 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Che-Chang Hsu, Li-Jui Chen | 2021-12-21 |
| 11172566 | Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator | Jen-Hung Hsiao, Li-Jui Chen, Shang-Chieh Chien | 2021-11-09 |
| 11166361 | Method and device for measuring contamination in EUV source | Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen | 2021-11-02 |
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen +2 more | 2021-10-26 |
| 11150561 | Method and apparatus for collecting information used in image-error compensation | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Li-Jui Chen +1 more | 2021-10-19 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su, Chieh Hsieh +1 more | 2021-10-19 |
| 11153958 | Extreme ultraviolet photolithography method | Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen | 2021-10-19 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-09-14 |
| 11106146 | Lithography system and method | Hao-Yu Lan, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2021-08-31 |
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2021-08-17 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang +1 more | 2021-08-10 |
| 11086237 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2021-08-10 |
| 11086209 | EUV lithography mask with a porous reflective multilayer structure | Chih-Tsung Shih, Shih-Chang Shih, Li-Jui Chen | 2021-08-10 |
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Chi YANG, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen | 2021-07-20 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Han-Lung Chang | 2021-07-20 |
| 11062898 | Particle removal apparatus, particle removal system and particle removal method | Siao-Chian Huang, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2021-07-13 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen | 2021-06-08 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen | 2021-06-08 |
| 11024623 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Li-Jui Chen +1 more | 2021-06-01 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2021-05-18 |
| 10997706 | Reticle backside inspection method | Zi-Wen Chen, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2021-05-04 |
| 10990026 | Lithography apparatus and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen | 2021-04-27 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2021-04-27 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +1 more | 2021-04-13 |