Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2021-09-14 |
| 11106146 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tzung-Chi Fu | 2021-08-31 |
| 11062898 | Particle removal apparatus, particle removal system and particle removal method | Siao-Chian Huang, Po-Chung Cheng, Ching-Juinn Huang, Tzung-Chi Fu | 2021-07-13 |