Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2021-09-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2021-09-14 |