Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11106146 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2021-08-31 |
| 11062898 | Particle removal apparatus, particle removal system and particle removal method | Siao-Chian Huang, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2021-07-13 |