Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
EL
En Hao Lai
Overall (2021): #464,253 of 548,734Top 85%
1
Patents 2021