Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086237 | Extreme ultraviolet lithography system | Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2021-08-10 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |