Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su +1 more | 2021-10-19 |
| 10993308 | Light source for lithography exposure process | Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-04-27 |
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-04-06 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |