Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-04-06 |
JC
Jen-Yang Chung
Overall (2021): #412,369 of 548,734Top 80%
1
Patents 2021