Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-07-20 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |