Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +6 more | 2021-09-28 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Po-Chung Cheng, Li-Jui Chen, Han-Lung Chang | 2021-07-20 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |