Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11212903 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Chun-Lin Chang, Li-Jui Chen | 2021-12-28 |
| 11153958 | Extreme ultraviolet photolithography method | Ming-Hsun Tsai, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2021-10-19 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Hsiao-Lun Chang, Li-Jui Chen +6 more | 2021-09-28 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Li-Jui Chen +1 more | 2021-08-10 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen | 2021-07-20 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 11029613 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Li-Jui Chen, Chia-Chen Chen | 2021-06-08 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-04-13 |